GM50A013504S63010
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Краткое описание:
METAL SEALED, DIGITAL MASS FLOW CONTROLLER
Дополнительная информация
The GM50A is a general purpose, metal sealed MFC well suited for a wide variety of applications requiring flow control capability from 5 sccm to 50 slm FS, N₂ equivalent. The GM50A incorporates the latest in digital flow control electronics along with a well proven, patented thermal sensor and mechanical design. The digitally controlled MFC is available with either analog or digital I/O. Its digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to setpoint throughout the device control range, with typical response times on the order of 500 milliseconds. A digital calibration yields 1% of setpoint accuracy on the calibration gas. The analog and digital I/O can easily be used to replace those same I/O types of the 1479A MFCs. The GM50A utilizes the standard 3-inch footprint and is metal sealed with an electropolished surface finish, making it well suited for use in high purity process applications. An MFM version (not electropolished) is also available.
| ECCN | EAR99 |
| PPAP | No |
| EU RoHS | Yes |
| Cage Code | 23582 |
| Automotive | No |
| Resolution | 0.1% of Full Scale |
| Schedule B | 9026105000 |
| Warm-up Time | < 30min |
| AEC Qualified | No |
| Control Range | 2% to 100% of F.S. |
| Repeatability | ± 0.3% of Reading |
| RoHS Versions | 2002/95/EC |
| Burst Pressure | 1500psig |
| Proof Pressure | 1000psig |
| Storage Humidity | 0 to 95% Relative Humiditynon-condensing |
| Storage Temperature | -20 to 80 (-4 to 149)°C (°F) |
| Full Scale Flow Ranges | 5 - 50000sccm N₂ equivalent |
| Maximum Inlet Pressure | 150psig |
| Inlet Pressure Coefficient | < 0.02% of Rdg./psi |
| Temperature Coefficient - Span | < 0.08% of Rdg./°C |
| Temperature Coefficient - Zero | < 0.05% of F.S./°C |
| Typical Accuracy (2 to 20% F.S.) | ± 0.2% of F.S. |
| Typical Controller Settling Time | < 750msec. |
| Typical Accuracy (20 to 100% F.S.) | ± 1% of setpoint |
| Operating Temperature Range (Ambient) | 10 to 50°C |
| Normal Operating Pressure Differential (5 to 5000 sccm) | 10 to 40psid |
| Normal Operating Pressure Differential (10000 to 20000 sccm) | 15 to 40psid |
| Normal Operating Pressure Differential (30000 to 50000 sccm) | 25 to 40psid |
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