GM50A110504S43010
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Краткое описание:
METAL SEALED, DIGITAL MASS FLOW CONTROLLER
Дополнительная информация
Metal-sealed digital mass flow controller in the GM50A family supports full-scale flow ranges from 5 sccm to 50 slm nitrogen equivalent. Digital control electronics provide fast repeatable setpoint response with typical settling below 750 ms and accuracy of ±1% of setpoint from 20% to 100% full scale on nitrogen calibration gas. The flow path uses 316L stainless steel and related wetted materials with a 10 microinch electropolished surface finish for high-purity gas applications. The device supports analog and digital I/O options including RS-485, DeviceNet and Profibus, and operates from 10°C to 50°C ambient temperature.
| ECCN | EAR99 |
| PPAP | No |
| Weight | <3lb |
| EU RoHS | Yes |
| Cage Code | 23582 |
| Automotive | No |
| Resolution | 0.1% FS |
| Schedule B | 9026105000 |
| Warm-up Time | <30min |
| AEC Qualified | No |
| Control Range | 2 to 100% FS |
| Repeatability | ±0.3% of reading |
| RoHS Versions | 2002/95/EC |
| Burst Pressure | 1500psig |
| Proof Pressure | 1000psig |
| Surface Finish | 10 average electropolished for MFC; 16 average for MFMµin Ra |
| Storage Humidity | 0 to 95 non-condensing% RH |
| Typical Accuracy | ±1% of setpoint for 20 to 100% FS; ±0.2% FS for 2 to 20% FS |
| Wetted Materials | 316L stainless steel VAR, 316 stainless steel, Elgiloy, Nickel; Teflon valve seat for MFC |
| Storage Temperature | -20 to 80°C |
| Full Scale Flow Range | 5 to 50000 N2 equivalentsccm |
| Maximum Inlet Pressure | 150psig |
| External Leak Integrity | <1 x 10^-10scc/sec He |
| Inlet Pressure Coefficient | <0.02% reading/psi |
| Span Temperature Coefficient | <0.08% reading/°C |
| Zero Temperature Coefficient | <0.05% FS/°C |
| Operating Ambient Temperature | 10 to 50°C |
| Typical Controller Settling Time | <750 above 5% FSms |
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